http://ir-heat-parts.com/en/tags/peb/ Recent content in (PEB) on IR Heating Lamp Parts Hugo en-us Fri, 03 Jul 2026 09:23:23 +0800 http://ir-heat-parts.com/en/posts/post-exposure-bake-peb-heater/ Fri, 03 Jul 2026 09:23:23 +0800 http://ir-heat-parts.com/en/posts/post-exposure-bake-peb-heater/ <p><img src="http://ir-heat-parts.com/images/e619a459508a95cd74ea4eae0be40cd1.png" alt="Post exposure bake (PEB) heater"></p> <p>On the lithography floor, PEB temperature drift doesn&rsquo;t show up with a warning light. It shows up as linewidth drift across the lot, then as yield loss that no audit can pin down. In a fab, thermal repeatability isn&rsquo;t a preference. It&rsquo;s the floor under process control.</p> <h2 id="what-matters-technically">What matters, technically</h2> <p>We built the PEB heater around short-wave infrared elements and a quartz-based thermal stack, so wafer-level uniformity lands within ±0.1°C across the bake surface. Temperature setpoints repeat tightly, shot after shot, which keeps the photoresist <a href="https://o-yate.com">chemical</a> amplification budget stable. The system is cleanroom-ready—Class 1–100 compatible—with materials chosen to hold particle generation at zero. It runs 24/7 without unplanned downtime, and it keeps energy use down without sacrificing thermal stability.</p>